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Öğe Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application(Spie-Soc Photo-Optical Instrumentation Engineers, 2018) Oyman, Hilmi Artun; Gokdel, Yigit Daghan; Ferhanoglu, Onur; Yalcinkaya, Arda DenizA magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3 x 10(6) cycle. The scanning device is designed to meet a confocal microscopy application providing 100 mu m x 100 mu m field of view and <3 mu m lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)Öğe A stainless-steel micro-scanner for rapid 3D confocal imaging(Iop Publishing Ltd, 2019) Oyman, Hilmi Artun; Efe, Baris Can; Icel, Mustafa Akin; Gokdel, Yigit Daghan; Ferhanoglu, Onur; Yalcinkaya, Arda DenizThis paper summarizes the design, fabrication, and characterization of a magnetically actuated stainless-steel based micro-scanner. The out-of-plane deflection of the proposed device is calculated by using a custom depth scan setup. The main advantage of laser cutting technology, which is utilized in manufacturing the proposed steel scanner, is its rapid fabrication capability at low cost, while still offering high frequency scan for imaging and/or ablation with high frame-rates. In the lateral plane, the scanner delivers 5 degrees of total optical scan angle for a current drive of 60 mA for both slow scan and fast scan axes at 998 Hz and 2795 Hz, respectively. Furthermore, the device provides an out-of-plane pumping mode at 1723 Hz that could be utilized for axial scanning to create focal shift at the target. Fabricated scanner is integrated into a confocal microscopy setup and tested with a resolution target and a Convallaria rhizome sample, accomplishing a 240 mu m x 240 mu m field of view with 2.8 mu m resolution. The device offers 218 mu m depth of field (in tissue) and based on acquired resonance frequencies, we estimate rapid scanning of a three-dimensional block of tissue (240 mu m x 240 mu m x 218 mu m size) with approximately 3 block per second with 50% fill rate and total coverage of 87% for 1 s scan. Finally, a custom setup is proposed for 3D imaging and validity of the 3D beam steering of the micro-scanner is tested.