Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection

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dc.authorid0009-0002-8777-1491
dc.authorid0000-0003-4634-4733
dc.authorid0009-0008-8419-6878
dc.authorid0000-0003-4988-1913
dc.authorid0000-0002-4374-1656
dc.authorid0009-0009-5110-7696
dc.contributor.authorAygul, Beril
dc.contributor.authorUlgaz, Sena
dc.contributor.authorYilmaz, Berkay
dc.contributor.authorAkcan, Omer Gokalp
dc.contributor.authorErdil, Kuter
dc.contributor.authorGokdel, Yigit Daghan
dc.date.accessioned2026-04-04T18:55:51Z
dc.date.available2026-04-04T18:55:51Z
dc.date.issued2025
dc.departmentİstanbul Bilgi Üniversitesi
dc.description.abstractThis paper details the design, fabrication, and characterization of a novel disposable MEMS airflow sensor, employing Bare Conductive electric paint deposited on Whatman 3MM chromatography paper through silk screen printing. The sensor achieves rapid fabrication within 30 minutes. It demonstrates a sensitivity of 1.8 kPa(-1) , a resolution of 27.6 kPa, and a limit of detection (LoD) of 48.94 kPa, with an operational pressure range from 27.6 to 137.9 kPa. An electronic readout circuit transduces electrical resistance variations into voltage signals, which are monitored via a digital multimeter and analyzed on a PC. The sensor's disposable nature mitigates nosocomial infection risks and enhances hygiene, making it ideal for monitoring respiratory conditions such as asthma and COPD. With a material cost of under 0.1, the sensor is highly suitable for scalable, cost-sensitive biomedical applications. Experimental validation confirms the reliability and precision of this proof-of-concept device in airflow measurement. 2024-0148
dc.description.sponsorshipScientific and Technological Research Council of Turkiye (TUB ITAK) 2209-A Research Project Support Programme for Undergraduate Students [1919B012326489]
dc.description.sponsorshipThis work was supported by the Scientific and Technological Research Council of Turkiye (TUB ITAK) 2209-A Research Project Support Programme for Undergraduate Students under Grant 1919B012326489. Subject Editor H. Li King Ho
dc.identifier.doi10.1109/JMEMS.2024.3484226
dc.identifier.doi10.1109/JMEMS.2024.3484226
dc.identifier.endpage107
dc.identifier.issn1057-7157
dc.identifier.issn1941-0158
dc.identifier.issue1
dc.identifier.scopus2-s2.0-85208376783
dc.identifier.scopusqualityQ1
dc.identifier.startpage100
dc.identifier.urihttps://doi.org/10.1109/JMEMS.2024.3484226
dc.identifier.urihttps://hdl.handle.net/11411/10583
dc.identifier.volume34
dc.identifier.wosWOS:001346649300001
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherIeee-Inst Electrical Electronics Engineers Inc
dc.relation.ispartofJournal of Microelectromechanical Systems
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_WoS_20260402
dc.snmzKA_Scopus_20260402
dc.subjectGraphite
dc.subjectPiezoresistance
dc.subjectStress
dc.subjectMicromechanical Devices
dc.subjectResistance
dc.subjectFabrication
dc.subjectVoltage Measurement
dc.subjectSensors
dc.subjectCosts
dc.subjectStructural Beams
dc.subjectPaper Based
dc.subjectMicroelectromechanical Device
dc.subjectLung Disease
dc.subjectMedical Device
dc.subjectBreath
dc.subjectSpirometer
dc.titleDisposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection
dc.typeArticle

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