Hydrogen gas sensing properties of nanoporous Al-doped titania

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dc.authorscopusid23984093700
dc.authorscopusid7004568862
dc.authorscopusid7003971869
dc.contributor.authorBayata, F.
dc.contributor.authorSaruhan-Brings, B.
dc.contributor.authorÜrgen, M.
dc.date.accessioned2024-07-18T20:16:51Z
dc.date.available2024-07-18T20:16:51Z
dc.date.issued2014
dc.description.abstractNanoporous aluminum doped titanium (TiAl) oxide thin film sensor materials with an Al concentration of 9-10 at.% were produced on alumina substrates and their hydrogen (H2) sensing behaviors were investigated. The well-adherent and dense metallic TiAl thin films with equiaxed structure were deposited on alumina substrates using cathodic arc physical vapor deposition (CAPVD) method and the nanopores were grown on the TiAl thin films by anodic oxidation in ammonium fluoride (NH4F) containing ethylene glycol (EG) electrolyte. With the deposition method utilized, it became possible to anodize the films without spalling and defects. The metallic film on alumina was totally anodized in order to eliminate short-circuit problems between the metallic layer below the oxide and Pt pads used for resistance measurements. The amorphous nanoporous structures were converted into anatase by heat treatment at 480 °C for 3 h and the fabrication of sensor was completed by depositing Pt contact pads on the surface of nanopores using magnetron sputtering technique. The hydrogen sensing performance of thin film nanoporous TiAl oxide sensor was studied in the range of 50-2500 ppm hydrogen at different temperatures (25-350 °C). The sensor characteristics in terms of sensitivity, response, recovery and stability were examined in detailed analysis and a possible hydrogen detection mechanism was proposed. The nanoporous TiAl oxide sensor exhibited promising sensing performance towards H2 gas concentrations and quick response and recovery behavior with high stability. © 2014 Elsevier B.V.en_US
dc.description.sponsorship109M313, 110M745; Türkiye Bilimsel ve Teknolojik Araştirma Kurumu, TÜBITAKen_US
dc.description.sponsorshipThis work was funded by the Scientific and Technological Research Council of Turkey (TUBITAK), Project Numbers: 110M745 and 109M313. The authors gratefully acknowledge Prof. Dr. Gultekin Goller and Talat Alpak for SEM investigations and Dr. Yakup Gonullu for technical help with the sensor measurements.en_US
dc.identifier.doi10.1016/j.snb.2014.07.079
dc.identifier.endpage118en_US
dc.identifier.issn0925-4005
dc.identifier.scopus2-s2.0-84906310443en_US
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage109en_US
dc.identifier.urihttps://doi.org/10.1016/j.snb.2014.07.079
dc.identifier.urihttps://hdl.handle.net/11411/6295
dc.identifier.volume204en_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherElsevieren_US
dc.relation.ispartofSensors and Actuators, B: Chemicalen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectAnodizationen_US
dc.subjectCathodic Arc Pvden_US
dc.subjectGas Sensoren_US
dc.subjectNanoporousen_US
dc.subjectAluminaen_US
dc.subjectAnodic Oxidationen_US
dc.subjectChemical Sensorsen_US
dc.subjectDepositionen_US
dc.subjectEthylene Glycolen_US
dc.subjectGas Detectorsen_US
dc.subjectGas Sensing Electrodesen_US
dc.subjectHydrogenen_US
dc.subjectMetallic Compoundsen_US
dc.subjectNanoporesen_US
dc.subjectPlatinumen_US
dc.subjectThin Filmsen_US
dc.subjectTitanium Alloysen_US
dc.subjectTitanium Compoundsen_US
dc.subjectTitanium Dioxideen_US
dc.subjectAnodizationsen_US
dc.subjectCathodic Arcen_US
dc.subjectNano-Porousen_US
dc.subjectTioen_US
dc.subjectAl-Dopeden_US
dc.subjectHydrogen Gas Sensingen_US
dc.subjectAluminumen_US
dc.subjectPhysical Vapor Depositionen_US
dc.titleHydrogen gas sensing properties of nanoporous Al-doped titaniaen_US
dc.typeArticleen_US

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