Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application

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dc.authoridGökdel, Yiğit Dağhan/0000-0003-4634-4733|Ferhanoglu, Onur/0000-0002-5381-533X
dc.authorwosidGökdel, Yiğit Dağhan/AAO-4840-2020
dc.authorwosidFerhanoglu, Onur/I-9348-2014
dc.contributor.authorOyman, Hilmi Artun
dc.contributor.authorGokdel, Yigit Daghan
dc.contributor.authorFerhanoglu, Onur
dc.contributor.authorYalcinkaya, Arda Deniz
dc.date.accessioned2024-07-18T20:47:37Z
dc.date.available2024-07-18T20:47:37Z
dc.date.issued2018
dc.departmentİstanbul Bilgi Üniversitesien_US
dc.description.abstractA magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3 x 10(6) cycle. The scanning device is designed to meet a confocal microscopy application providing 100 mu m x 100 mu m field of view and <3 mu m lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)en_US
dc.description.sponsorshipTUBITAK [113S114]en_US
dc.description.sponsorshipThe authors acknowledge TUBITAK for the funding of project: TUBITAK SBAG 113S114 and TUBA-GEBIP award.en_US
dc.identifier.doi10.1117/1.OE.57.4.041405
dc.identifier.issn0091-3286
dc.identifier.issn1560-2303
dc.identifier.issue4en_US
dc.identifier.scopus2-s2.0-85041469181en_US
dc.identifier.scopusqualityQ2en_US
dc.identifier.urihttps://doi.org/10.1117/1.OE.57.4.041405
dc.identifier.urihttps://hdl.handle.net/11411/7867
dc.identifier.volume57en_US
dc.identifier.wosWOS:000435435600007en_US
dc.identifier.wosqualityQ3en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherSpie-Soc Photo-Optical Instrumentation Engineersen_US
dc.relation.ispartofOptical Engineeringen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectConfocal Microscopyen_US
dc.subjectScannersen_US
dc.subjectMicro-Optical Devicesen_US
dc.subjectElectromagnetic Opticsen_US
dc.subjectOptical Coherence Tomographyen_US
dc.subjectMems Scanneren_US
dc.subjectDesignen_US
dc.titlePerformance of a three-dimensional-printed microscanner in a laser scanning microscopy applicationen_US
dc.typeArticleen_US

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