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    A self-tuning resonance-locking method for polymer MEMS microscanners
    (Iop Publishing Ltd, 2026) Alcicek, Berkay; Arseven, Aysin; Sarioglu, Baykal; Gokdel, Y. Daghan
    This study presents a self-tuning optical MEMS microscanner based on a low-cost polyimide structure integrated with a piezoresistive feedback mechanism. The system automatically detects and tracks the torsional resonance frequency (approximate to 81 Hz), compensating for spring softening effects that otherwise degrade scan performance. A custom frequency sweep algorithm, combined with a closed-loop control, dynamically adjusts the actuation signal to maintain resonance-locked operation, enabling stable mechanical scan angles of 10-12 degrees ( approximate to 42 degrees total optical scan angle (TOSA)) at drive levels of 8-10 Vpp and 60-80 mA ( approximate to 0.5z-0.8W). This approach ensures stable displacement and total optical scan angle over time, even under frequency drift. In high-power characterization sweeps, the device demonstrates optical scan angles up to 100 degrees TOSA. The proposed architecture offers a practical and scalable solution for energy-efficient, high-resolution optical scanning using inexpensive and easily manufacturable polymer-based MEMS devices.
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    Embedded System Design and Implementation For a Miniaturized Laser Projection Display
    (IEEE, 2019) Kucuk, Elif; Arseven, Aysin; Sarioglu, Baykal; Gokdel, Y. Daghan
    In this work, a low power compact embedded system for steel scanner based miniaturized projection displays is presented. The proposed system is composed of a steel micro scanner, a microcontroller unit, a power amplifier, a 5mW laser with 650nm wavelength and a transistor-based laser driver. The proposed embedded system generates two actuation signals for vertical and horizontal movements of the scanner. The embedded system also generates laser pulses in synchronization with the actuation signals to form a stable and undistorted image. The steel scanner's total optical scanning angles (TOSA) are 5.415 and 3.2729 in slow-scan and fast-scan directions, respectively. Slow scan frequency is 264 Hz, while the fast scan frequency is 2640 Hz. The proposed device can deliver sufficient torque to allow non-resonant operation. Sample images generated using the proposed system are also given.