Sarıoğlu, BaykalGökdel, Yiğit DağhanArseven, Ayşin2023-08-182023-08-182023https://hdl.handle.net/11411/5174https://tez.yok.gov.tr/UlusalTezMerkezi/TezGoster?key=j_Fjwp4JS4mk97Puqti8ro0qHOkX71zZDjMyK9yUdgbOxhQkY0g-yzOKDREfiKzsABSTRACT: This thesis demonstrates design, implementation, and experimental results of a low-cost, and low-power one-dimensional two gimballed magnetically actuated scanner capable of unidirectional scanning with piezoresistive feedback system that can be used for bioscanning applications. The proposed exible scanner structure consists of an embedded planar electrocoil with the main fabrication material polyimide. Moreover, the system ensures real-time feedback signal by means of the graphite that is coated onto the exure for the sake of the closed-loop systems. The system is auto-tuned in order to maintain the resonant mode of the microscanner. The slight, and exible substrate material of the scanner reduces the energy consumption and performs as 1D-scanning. The optimization and characterization of the planar electrocoil embedded in the scanner, which activates the scanner by creating an electromagnetic eld with the e ect of the external magnet, has been completed. The size of the outer frame of the structure is 40 mm 40 mm, and the moving scanning surface is 15 mm 14 mm with a thickness of 150 m. In order to maximize the amount of scanner displacement and total optical scanning angle (TOSA), the positions of the system components is optimized. Polyimide-based scanner's optical scanning angle is 73:59 in slow-scan direction at the approximately 82 Hz. Moreover, the saturation point frequency from the real-time piezoresistive feedback is approximately 81 Hz. The average error rate result is a 1.2%. The proposed scanner structure is characterized and tested in various experiments using a laser doppler vibrometer setup, and a piezoresistive feedback setup.eninfo:eu-repo/semantics/openAccessMicroscannerMagnetic actuation schemePlanar electrocoilTotal optical scan angle (TOSA)Piezoresistive feedbackMikrotarayıcıManyetik hareketlendirme şemasıDüzlemsel elektrobobinToplam optik tarama açısı (TOSA)Piyezodirençli geri beslemeMaster Thesis802990