Oyman, H. A.Gokdel, Y. D.Ferhanoglu, O.Yalcinkaya, A. D.2024-07-182024-07-1820161742-65881742-6596https://doi.org/10.1088/1742-6596/757/1/012024https://hdl.handle.net/11411/760427th Micromechanics and Microsystems Europe (MME) Workshop -- AUG 28-30, 2016 -- Cork, IRELANDA two-dimensional (2D) polymer based scanning mirror with magnetic actuation is developed for imaging applications. Proposed device consists of a circular suspension holding a rectangular mirror and can generate a 2D scan pattern. Three dimensional (3D) printing technology which is used for implementation of the device, offers added flexibility in controlling the cross-sectional profile as well as the stress distribution compared to the traditional planar process technologies. The mirror device is developed to meet a portable, miniaturized confocal microscope application in mind, delivering 4.5 and 4.8 degrees of optical scan angles at 111 and 267 Hz, respectively. As a result of this mechanical performance, the resulting microscope incorporating the mirror is estimated to accomplish a field of view (FOV) of 350 mu m x 350 mu m.eninfo:eu-repo/semantics/openAccessMicroscopeConference Object2-s2.0-8500239807810.1088/1742-6596/757/1/012024N/A757N/AWOS:000439687000024