Oyman, Hilmi ArtunGokdel, Yigit DaghanFerhanoglu, OnurYalcinkaya, Arda Deniz2024-07-182024-07-1820180091-32861560-2303https://doi.org/10.1117/1.OE.57.4.041405https://hdl.handle.net/11411/7867A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3 x 10(6) cycle. The scanning device is designed to meet a confocal microscopy application providing 100 mu m x 100 mu m field of view and <3 mu m lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)eninfo:eu-repo/semantics/closedAccessConfocal MicroscopyScannersMicro-Optical DevicesElectromagnetic OpticsOptical Coherence TomographyMems ScannerDesignArticle2-s2.0-8504146918110.1117/1.OE.57.4.0414054Q257Q3WOS:000435435600007